Verification of the form of microlens arrays for atmospheric wavefront sensors using phase-stepping microscopy

Paul C. Montgomery; Jean-Pierre Fillard; Guy Edouard Artzner

doi:10.1117/12.138907

13 January 1993 Verification of the form of microlens arrays for atmospheric wavefront sensors using phase-stepping microscopy

Paul C. Montgomery, Jean-Pierre Fillard, Guy Edouard Artzner

Author Affiliations +

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138907
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Microlens arrays play an important role in atmospheric wavefront sensors used by ground based astronomers in order to obtain diffraction limited images of stars in the presence of wavefront disturbances introduced by the earth's atmosphere. One technique for making these arrays is to use a two axes rastering process for engraving in photoresist coatings, producing square lenses with no room left between them. Obviously the efficiency of the arrays depends on the quality of the lenses. The surface shape is normally checked qualitatively with Nomarski and quantitatively using stylus profiling. Phase stepping microscopy has recently been applied to the problem, for measuring the shape of individual lenses and comparing the results with spherical profiles. The initial results have been very successful. Some typical examples are given and the results discussed to show the potential of such work in improving the quality of microlens arrays.

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Paul C. Montgomery, Jean-Pierre Fillard, and Guy Edouard Artzner "Verification of the form of microlens arrays for atmospheric wavefront sensors using phase-stepping microscopy", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138907

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