Attenuated total reflectance infrared absorption in CVD diamond films

Phillip John; David K. Milne; Iain C. Drummond; John I.B. Wilson; Mike G. Jubber; James Anthony Savage

doi:10.1117/12.130774

20 November 1992 Attenuated total reflectance infrared absorption in CVD diamond films

Phillip John, David K. Milne, Iain C. Drummond, John I.B. Wilson, Mike G. Jubber, James Anthony Savage

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130774
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

The infrared absorption in microwave plasma-deposited, polycrystalline diamond films has been measured for the C-H stretch-mode and the diamond two-phonon mode, giving absorption coefficients of approximately 26 and 7.5 cm^-1 respectively for a 20 micrometers thin film, assuming that the whole thickness of the film is responsible. The C-H absorption band envelope has been deconvoluted into its various components, allowing some estimation of the relative importance of CH, CH₂, and CH₃ grouping in the films. A significant absorption at approximately 3 micrometers due to N-H has been measured in films exposed to atomic nitrogen.

Citation Download Citation

Phillip John, David K. Milne, Iain C. Drummond, John I.B. Wilson, Mike G. Jubber, and James Anthony Savage "Attenuated total reflectance infrared absorption in CVD diamond films", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130774

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