ESR of diamondlike nuclei created in Si surface by C ion implantation

Tomio Izumi; Y. Show; Norio Arai; Masahiro Deguchi; Makoto Kitabatake; Akihisa Yoshida; Takashi Hirao; Yusuke Mori; T. Ito; Akio Hiraki

doi:10.1117/12.130761

20 November 1992 ESR of diamondlike nuclei created in Si surface by C ion implantation

Tomio Izumi, Y. Show, Norio Arai, Masahiro Deguchi, Makoto Kitabatake, Akihisa Yoshida, Takashi Hirao, Yusuke Mori, T. Ito, Akio Hiraki

Author Affiliations +

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130761
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

The defect structures of Si surface layer modified by high dose carbon ion implantation have been studied by ESR (electron spin resonance) method. The ESR analysis revealed the presence of three paramagnetic defects, that is, Si-dangling bonds (g=2.0060, Hpp =6.3 Oe) in Si amorphous region caused by the implantation, Si-dangling bonds with C atom neighbors (g=2.0035, LHpp =6.8 Oe) and C-dangling bond with C atoms neighbors. Moreover, it was found that the tight diamond-like C-C bonds are formed in the implanted Si surface layer. The diamond-like C-C bonds have an important role in obtaining high quality synthesized CVD diamonds.

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Tomio Izumi, Y. Show, Norio Arai, Masahiro Deguchi, Makoto Kitabatake, Akihisa Yoshida, Takashi Hirao, Yusuke Mori, T. Ito, and Akio Hiraki "ESR of diamondlike nuclei created in Si surface by C ion implantation", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130761

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