Effect of MTF of digital image acquisition device on phase-measuring profilometry

Xianyu Su; Xiang Zhou

doi:10.1117/12.139112

12 January 1993 Effect of MTF of digital image acquisition device on phase-measuring profilometry

Xianyu Su, Xiang Zhou

Proceedings Volume 1771, Applications of Digital Image Processing XV; (1993) https://doi.org/10.1117/12.139112
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

As affected by MTF of digital ynage acquisition device, the algorithm of phase-measuring profilometry(PMP) 1,2 cannot be regarded as ”point to point” operation.The phase of a point is not only dependent on its N intensity values obtained by digital phase-shifting technique, but also related to its adjacent points. So systematic errors are introduced by MTF.The theoretical analysis is presented, results for simulation and experiment are given.

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Xianyu Su and Xiang Zhou "Effect of MTF of digital image acquisition device on phase-measuring profilometry", Proc. SPIE 1771, Applications of Digital Image Processing XV, (12 January 1993); https://doi.org/10.1117/12.139112

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KEYWORDS

Modulation transfer functions

CCD cameras

Digital imaging

Computer simulations

Phase shifts

Digital image processing

Error analysis

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