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15 December 1992 Limitations of phase-measuring interferometry for surface characterization and testing: a review
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Abstract
Since its discovery, interferometry has grown into a powerful technique for the characterization and evaluation of optical surfaces. With the advent of phase-measurement algorithms, computers, and solid state detectors, it is now possible to acquire wavefront maps over a well sampled pupil in fractions of a second. Nevertheless, even though there have been significant advances, limitations of the technology should always be acknowledged. Emphasis in this paper is placed on reviewing basic interference, optical component, source, imaging, phase-shifting, detector, mechanical and acoustical stability, air turbulence, and sampling requirements for high accuracy and precision phase-shifting interferometry measurements. Limitations of the technology will be outlined, and where applicable, techniques developed to overcome limitations will be discussed and references sited.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene R. Cochran III "Limitations of phase-measuring interferometry for surface characterization and testing: a review", Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); https://doi.org/10.1117/12.139237
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