Specification of the surface figure and finish of optical elements in terms of system performance

Eugene L. Church; Peter Z. Takacs

doi:10.1117/12.140999

1 January 1993 Specification of the surface figure and finish of optical elements in terms of system performance

Eugene L. Church, Peter Z. Takacs

Proceedings Volume 1781, Specification and Measurement of Optical Systems; (1993) https://doi.org/10.1117/12.140999
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

This paper describes methods of predicting the degradation of the performance of a simple imaging system in terms of the statistics of the shape errors of the focussing element, and conversely, of specifying those statistics in terms of requirements on image quality. Results are illustrated for normal-incidence x-ray mirrors having figure errors plus conventional and/or fractal finish errors.

Citation Download Citation

Eugene L. Church and Peter Z. Takacs "Specification of the surface figure and finish of optical elements in terms of system performance", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); https://doi.org/10.1117/12.140999

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