Amount of information contained in data of ellipsometric measurements

Kirill M. Kuzanyan

doi:10.1117/12.141040

4 March 1993 Amount of information contained in data of ellipsometric measurements

Kirill M. Kuzanyan

Proceedings Volume 1782, Thin Films for Optical Systems; (1993) https://doi.org/10.1117/12.141040
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

Determination of optical constants of thin films on thick substrates is discussed. The level of information contained in ellipsometric measurements is investigated. The parameters of the most important contribution to the ellipsometric data are selected. An attempt to explain the difficulties of solution of the inverse problem in ellipsometry is carried out.

Citation Download Citation

Kirill M. Kuzanyan "Amount of information contained in data of ellipsometric measurements", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); https://doi.org/10.1117/12.141040

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