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11 July 1979Optical Modal Deformation Sensor For Heterodyne Interferometry
A sensor system based on the principle of the heterodyne interferometer can be used to sense modal deformations of optical surfaces. This paper describes significant characteristics of these optical mode sensors and optical configurations appropriate to sense piston, tilts, focus, and higher order modes like astigmatism, coma, and spherical aberration. Electronic processing of sensor signals to extract the optical mode magnitudes is described. Then the system is applied to the problem of real-time removal of dynamic tilts produced by air turbulence and mechanical vibrations in the phase data measured by a broad beam hetero-dyne interferometer.
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Robert Field, Martin Tarabocchia, Sandor Holly, Frederic White, "Optical Modal Deformation Sensor For Heterodyne Interferometry," Proc. SPIE 0179, Adaptive Optical Components II, (11 July 1979); https://doi.org/10.1117/12.957291