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2 March 1993 Integrated optical nanomechanical devices as modulators, switches, and tunable frequency filters, and as acoustical sensors
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Walter Lukosz "Integrated optical nanomechanical devices as modulators, switches, and tunable frequency filters, and as acoustical sensors", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); https://doi.org/10.1117/12.141219
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