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2 March 1993 Micromachined Fabry-Perot interferometer with corrugated silicon diaphragm for fiber optic sensing applications
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Abstract
A new design for a miniature Fabry-Perot Interferometer (FPI) mounted on the tip of an optical fiber for sensing applications is presented. The Fabry-Perot Cavity (FPC) is formed by a micromachined corrugated silicon diaphragm anodically bonded to a pyrex substrate. In this way, this devices takes advantage of the sensitivity and selectivity of an optical interferometer combined with the small size, lightweight and EMI immunity properties of optical fibers to create compact, lightweight and almost entirely dielectric sensors for the measurement of pressure, acceleration, sound, electric and magnetic field, etc. in remote, dangerous or inaccessible places. A discussion on the operation and fabrication of the FPC is given, along with experimental results obtained in its application as an electric field sensor.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexis Mendez, Theodore F. Morse, and Keith A. Ramsey "Micromachined Fabry-Perot interferometer with corrugated silicon diaphragm for fiber optic sensing applications", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); https://doi.org/10.1117/12.141214
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