Paper
6 April 1993 Characterization of proton-exchanged planar waveguides on z-cut lithium tantalate
Dennis K. Kan, Gar Lam Yip
Author Affiliations +
Proceedings Volume 1794, Integrated Optical Circuits II; (1993) https://doi.org/10.1117/12.141883
Event: Fibers '92, 1992, Boston, MA, United States
Abstract
We have characterized proton-exchanged z-cut LiTaO3 planar waveguides fabricated with pyrophosphoric acid. A step index profile was assumed. Following proton-exchange the waveguides were annealed at temperatures from 300 degree(s)C to 500 degree(s)C. Interestingly, the surface index n, increased instead of decreasing. The waveguide depth d, (Delta) ns, and shape of the index profile were closely monitored throughout annealing, and the results are presented. The mechanism of the surface index increase with annealing is explained and the results support this theory.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dennis K. Kan and Gar Lam Yip "Characterization of proton-exchanged planar waveguides on z-cut lithium tantalate", Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); https://doi.org/10.1117/12.141883
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KEYWORDS
Waveguides

Annealing

Diffusion

Planar waveguides

Lithium

Photonic integrated circuits

Dispersion

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