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6 April 1993 One-step stripe waveguide fabrication process for polymer integrated optics
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Proceedings Volume 1794, Integrated Optical Circuits II; (1993) https://doi.org/10.1117/12.141909
Event: Fibers '92, 1992, Boston, MA, United States
Abstract
Single-mode stripe optical waveguides in poled organic thin films have been fabricated by excimer laser photoablation using wavelengths at 248 nm and 193 nm. The process uses a quartz proximity photomask as a stencil to the collimated laser light. The process also requires relatively low light densities (approximately 20 mJ/cm2) allowing large areas to be processed with currently available excimer lasers. This one-step process allows the definition of intricate structures without altering film alignment properties necessary to utilize the inherent electro-optic effect. Possible distortion of waveguide structures caused by diffraction elements (such as in waveguide Y-junctions) is examined. Active devices exhibit electro-optic coefficients similar to equivalent planar waveguide devices.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alan C. G. Nutt "One-step stripe waveguide fabrication process for polymer integrated optics", Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); https://doi.org/10.1117/12.141909
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