Continuous surface-relief gratings for two-dimensional array generation

Peter Ehbets; Hans Peter Herzig; D. Prongue; Michael T. Gale

doi:10.1117/12.147830

12 July 1993 Continuous surface-relief gratings for two-dimensional array generation

Peter Ehbets, Hans Peter Herzig, D. Prongue, Michael T. Gale

Proceedings Volume 1806, Optical Computing; (1993) https://doi.org/10.1117/12.147830
Event: Topical Meeting on Optical Computing, 1992, Minsk, Belarus

Abstract

Continuous surface-relief phase gratings for two-dimensional (2-D) array generation have been designed and fabricated by laser-beam writing lithography. Separable and non-separable solutions for the design of 2-D fan-out elements are compared. A 9 X 9 fan-out element has been fabricated in photoresist by laser-beam writing. A diffraction efficiency of 94% and an uniformity better than +/- 8% over the whole array were achieved.

Citation Download Citation

Peter Ehbets, Hans Peter Herzig, D. Prongue, and Michael T. Gale "Continuous surface-relief gratings for two-dimensional array generation", Proc. SPIE 1806, Optical Computing, (12 July 1993); https://doi.org/10.1117/12.147830

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