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12 July 1993 Micro-optical setup with microlenses and microprisms based on refractive optics
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Proceedings Volume 1806, Optical Computing; (1993) https://doi.org/10.1117/12.147834
Event: Topical Meeting on Optical Computing, 1992, Minsk, Belarus
Abstract
Deep etch lithography of PMMA by the LIGA-technique or H+ lithography is a powerful tool for the fabrication of very high refractive microprisms. We have realized a microintegrated optical imaging system using microprisms fabricated by the LIGA-process and microlenses with a diameter of 250 micrometers . Thus the size of the imaging system is less than 2 mm+.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karl-Heinz Brenner, Michael Frank, Maria Kufner, Stefan Kufner, Joerg Moisel, A. Mueller, Stefan Sinzinger, Markus E. Testorf, Jost Goettert, and Juergen Mohr "Micro-optical setup with microlenses and microprisms based on refractive optics", Proc. SPIE 1806, Optical Computing, (12 July 1993); https://doi.org/10.1117/12.147834
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