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4 May 1993 Progress of excimer laser development in the AMMTRA project
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Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144662
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece
Abstract
Since 1986, five kinds of excimer laser technologies have been studied by five companies as part of the large-scale project `Advanced Material-Processing and Machining System,' which is one of the national R&D projects in Japan. The five kinds of excimer lasers being developed are as follows: (1) high power XeCl laser with an average power of 2 kW, (2) high repetition rate XeCl laser with a repetition rate of 5 kHz, (3) automatically power-stabilized 400 W average power XeCl laser with a stability of +/- 1% or less, (4) long-life ArF laser with a gas life of 109 shots or more, and (5) high beam-quality ArF laser with an average power of 200 W. The project passed an interim evaluation at the end of fiscal 1990, and is now ongoing toward the achievement of final targets as of the end of fiscal 1993. The present status and future prospect of the technologies are reviewed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Haruhiko Nagai "Progress of excimer laser development in the AMMTRA project", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144662
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