High-performance surface-emitting lasers with dry-etched facets

Szutsun Simon Ou; Michael Jansen; Jane J. Yang; Moshe Sergant; Cynthia A. Hess; Chan A. Tu; Fernando D. Alvarez

doi:10.1117/12.131265

23 October 1992 High-performance surface-emitting lasers with dry-etched facets

Szutsun Simon Ou, Michael Jansen, Jane J. Yang, Moshe Sergant, Cynthia A. Hess, Chan A. Tu, Fernando D. Alvarez

Proceedings Volume 1813, Optoelectronic Component Technologies; (1992) https://doi.org/10.1117/12.131265
Event: International Symposium on Optoelectronics in Computers, Communications, and Control, 1992, Hsinchu, Taiwan

Abstract

Monolithic in-plane surface emitting laser diode arrays with 45 degree(s) micromirrors offer great promise for both coherent and incoherent applications. This paper describes several such laser diode structures in both the junction-up and junction-down configurations, and summarizes their design, fabrication and performance characteristics.

Citation Download Citation

Szutsun Simon Ou, Michael Jansen, Jane J. Yang, Moshe Sergant, Cynthia A. Hess, Chan A. Tu, and Fernando D. Alvarez "High-performance surface-emitting lasers with dry-etched facets", Proc. SPIE 1813, Optoelectronic Component Technologies, (23 October 1992); https://doi.org/10.1117/12.131265

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