Laser gage using chirped synthetic wavelength interferometry

Peter J. de Groot; John A. McGarvey

doi:10.1117/12.145530

28 May 1993 Laser gage using chirped synthetic wavelength interferometry

Peter J. de Groot, John A. McGarvey

Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145530
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

An absolute-ranging interferometer will be described that is suitable for dimensional gaging and surface profiling in manufacturing applications. The interferometer has a two-frequency source and a continuously tuned or 'chirped' synthetic wavelength. The fiber-coupled experimental system uses an eye-safe 25 (mu) W, 0.25 mm diameter collimated probe beam; and has an absolute distance measurement accuracy of 3 micrometers over a 150 mm dynamic range.

Citation Download Citation

Peter J. de Groot and John A. McGarvey "Laser gage using chirped synthetic wavelength interferometry", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); https://doi.org/10.1117/12.145530

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