Role Of Surface Topography In X-Ray Scattering

E. L. Church

doi:10.1117/12.957451

9 August 1979 Role Of Surface Topography In X-Ray Scattering

E. L. Church

Proceedings Volume 0184, Space Optics Imaging X-Ray Optics Workshop; (1979) https://doi.org/10.1117/12.957451
Event: 1979 Huntsville Technical Symposium, 1979, Huntsville, United States

Abstract

This paper discusses the relationship between x-ray mirror scattering and surface topography using vector electromagnetic scattering theory. The results relate the angular distribution of the scattered intensity to various surface-finish parameters which can, in principle, be determined independently; for example, by x-ray scattering in other geometries, visible-light scattering, or stylus measurements. The key role of spatial band-width limits in such parameters is emphasized. General results are described and illustrated by a discussion of the scattering from isotropically rough surfaces, measured in both a point-detector and in a line-detector geometry. Recent experimental results are then interpreted in terms of the surface-tension model of surface roughness, which predicts a hyperbolic scattering in the line-detector geometry. The present results are offered as a subject for further experimental investigation, a mechanism for predicting the scattering from a given surface, and as a rationale for specifying surface finish in terms of system performance.

Citation Download Citation

E. L. Church "Role Of Surface Topography In X-Ray Scattering", Proc. SPIE 0184, Space Optics Imaging X-Ray Optics Workshop, (9 August 1979); https://doi.org/10.1117/12.957451

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