Page-sized amorphous silicon image sensor arrays

Robert A. Street; Richard L. Weisfield; Steven E. Nelson; R. Chang

doi:10.1117/12.148592

12 July 1993 Page-sized amorphous silicon image sensor arrays

Robert A. Street, Richard L. Weisfield, Steven E. Nelson, R. Chang

Proceedings Volume 1900, Charge-Coupled Devices and Solid State Optical Sensors III; (1993) https://doi.org/10.1117/12.148592
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States

Abstract

A page-sized flat-plate image sensor array intended for use as a contact imager for documents is described. The imaging device is a matrix-addressed pixel array of light sensors fabricated from hydrogenated amorphous silicon on a glass substrate, with each pixel comprising an n-i-p sensor and a thin film switching transistor. The array requires no imaging optics and therefore collects light very efficiently, making it well suited to high speed document input or for medical X-ray imaging. The array fabrication, drive electronics, imaging properties, and applications are discussed, and some examples of images are presented.

Citation Download Citation

Robert A. Street, Richard L. Weisfield, Steven E. Nelson, and R. Chang "Page-sized amorphous silicon image sensor arrays", Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); https://doi.org/10.1117/12.148592

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