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12 July 1993 Page-sized amorphous silicon image sensor arrays
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Proceedings Volume 1900, Charge-Coupled Devices and Solid State Optical Sensors III; (1993) https://doi.org/10.1117/12.148592
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States
Abstract
A page-sized flat-plate image sensor array intended for use as a contact imager for documents is described. The imaging device is a matrix-addressed pixel array of light sensors fabricated from hydrogenated amorphous silicon on a glass substrate, with each pixel comprising an n-i-p sensor and a thin film switching transistor. The array requires no imaging optics and therefore collects light very efficiently, making it well suited to high speed document input or for medical X-ray imaging. The array fabrication, drive electronics, imaging properties, and applications are discussed, and some examples of images are presented.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert A. Street, Richard L. Weisfield, Steven E. Nelson, and R. Chang "Page-sized amorphous silicon image sensor arrays", Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); https://doi.org/10.1117/12.148592
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