Paper
27 August 1993 Laser-induced generation and patterning of electrically conducting polymers
Joachim Bargon, Reinhard R. Baumann
Author Affiliations +
Proceedings Volume 1910, Electroluminescent Materials, Devices, and Large-Screen Displays; (1993) https://doi.org/10.1117/12.151136
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States
Abstract
Lithographic patterns of electrically conducting polymers are obtained starting from films of insulating precursor polymers or from appropriate composites via laser irradiation. The precursor polymers yield conducting patterns directly, whereas in the composites the initially formed latent images have to be developed in a subsequent step. Vapors of pyrrole, thiophene, or aniline derivatives are used as gaseous developers. Laser ablation of the materials may be combined with the laser induced generation of electrical conductivity using the same exposure apparatus.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joachim Bargon and Reinhard R. Baumann "Laser-induced generation and patterning of electrically conducting polymers", Proc. SPIE 1910, Electroluminescent Materials, Devices, and Large-Screen Displays, (27 August 1993); https://doi.org/10.1117/12.151136
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Cited by 3 scholarly publications.
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KEYWORDS
Polymers

Composites

Laser ablation

Lithography

Plasma etching

Dielectrics

Optical lithography

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