Simulation of spray/puddle resist development

Stewart A. Robertson; J. Tom M. Stevenson; Robert J. Holwill; Steven G. Hansen; Rodney J. Hurditch; Mark Thirsk; Ivan S. Daraktchiev

doi:10.1117/12.154750

15 September 1993 Simulation of spray/puddle resist development

Stewart A. Robertson, J. Tom M. Stevenson, Robert J. Holwill, Steven G. Hansen, Rodney J. Hurditch, Mark Thirsk, Ivan S. Daraktchiev

Author Affiliations +

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154750
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

This work describes how spray/puddle development can be simulated using two separate sets of dissolution rate parameters. The first set of values is derived under continuous spray conditions and represents the wetting, or `spray,' period of the process; the second set, derived during stationary puddle development, deals with the remaining process period. The validity of decoupling the two development stages is supported by the good agreement between SAMPLE simulations and experimental results. Process windows and clearing doses are calculated and measured for a fixed time development process, as the spray to puddle time ratio is reduced from one to zero.

Citation Download Citation

Stewart A. Robertson, J. Tom M. Stevenson, Robert J. Holwill, Steven G. Hansen, Rodney J. Hurditch, Mark Thirsk, and Ivan S. Daraktchiev "Simulation of spray/puddle resist development", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154750

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available