Understanding the novolak synthesis reaction

Leonard E. Bogan Jr.

doi:10.1117/12.154791

15 September 1993 Understanding the novolak synthesis reaction

Leonard E. Bogan Jr.

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154791
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

We describe new tools for the characterization of novolac resins, for the understanding of the novolac synthesis reaction, and for the prediction of resin structures. These tools have been used to optimize the performance of photoresists for microlithography. The current state-of- the-art describes novolac copolymer compositions as the ratio of monomers charged in the reaction, even though it is well known that the actual product composition is quite different. Quantitative ¹³C NMR spectroscopy provides a direct method for accurately determining copolymer composition by integrating methyl carbon resonances. By using this method to analyze the results of competition reactions, relative monomer and site reactivities for phenol and the cresols with formaldehyde have been determined. These observed reactivities have been used in a simple, kinetic model to accurately predict copolymer composition, branch density, and molecular weight.

Citation Download Citation

Leonard E. Bogan Jr. "Understanding the novolak synthesis reaction", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154791

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