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4 August 1993 Images of dielectric film structures on reflecting substrates
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Abstract
A rigorous numerical technique to calculate images of optically thick one-dimensional objects as formed by an optical scanning microscope is presented. The geometry of the selected system allows us to simulate microscopes in various modes of image formation (coherent, partially coherent, bright-field, dark-field, and confocal). We consider the cases of s- and p- polarized illumination. The samples consist of dielectric film structures deposited on perfectly conducting flat substrates, and are characterized by the surface profile, the film thickness, and the complex refractive index of the dielectric. Examples of bright-field coherent images calculated with this technique are shown.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Felix Aguilar and Eugenio R. Mendez "Images of dielectric film structures on reflecting substrates", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); https://doi.org/10.1117/12.148944
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