Far-infrared microscopy of low-dimensional semiconductors

Reimund Merz

doi:10.1117/12.2298162

14 December 1992 Far-infrared microscopy of low-dimensional semiconductors

Reimund Merz

Proceedings Volume 1929, 17th International Conference on Infrared and Millimeter Waves; 192919 (1992) https://doi.org/10.1117/12.2298162
Event: 17th International Conference on Infrared and Millimeter Waves, 1992, Pasadena, CA, United States

Abstract

Sub-wavelength focusing of far-infrared light-using tapered hollow and coaxial waveguides-is introduced to spatially resolve inhomogeneities and edges of semicon- ductor structures with reduced dimensions.

Citation Download Citation

Reimund Merz "Far-infrared microscopy of low-dimensional semiconductors", Proc. SPIE 1929, 17th International Conference on Infrared and Millimeter Waves, 192919 (14 December 1992); https://doi.org/10.1117/12.2298162

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