Planar waveguides fabricated by proton irradiation in quartz silica

A. V. Tomov; L. M. Shteyngart; V. P. Red'ko; Anton V. Malko

doi:10.1117/12.145596

14 May 1993 Planar waveguides fabricated by proton irradiation in quartz silica

A. V. Tomov, L. M. Shteyngart, V. P. Red'ko, Anton V. Malko

Author Affiliations +

Proceedings Volume 1932, Guided-Wave Optics; (1993) https://doi.org/10.1117/12.145596
Event: Guided Wave Optics, 1992, Moscow, Russian Federation

Abstract

Parameters of refractive-index profile, the birefringence value, and mode interference pattern of buried planar waveguides fabricated by proton irradiation with doses from 10¹⁴ to 10¹⁷ cm^-2 have been investigated experimentally. It has been shown that the Epsteyn model is a good approximation of waveguide refractive-index profile. The mechanical stress distribution in such waveguide layers has been studied by optical methods. A method for reconstructing the radiation induced defect distribution in the collision region has been proposed. The value of the proportionality factor in the refractive-index increment dependence on dose was determined more exactly on the basis of experimental data. Changes of the waveguide parameters dependent on the temperature of isochronous annealing also have been investigated.

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A. V. Tomov, L. M. Shteyngart, V. P. Red'ko, and Anton V. Malko "Planar waveguides fabricated by proton irradiation in quartz silica", Proc. SPIE 1932, Guided-Wave Optics, (14 May 1993); https://doi.org/10.1117/12.145596

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