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31 August 1993 Commercial CMOS foundry thermal display for dynamic thermal scene simulation
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Abstract
We report on the performance of a flat-panel thermal display technology, prototype developed at NIST in collaboration with Simon Fraser University and Optical E. T. C., for dynamic thermal scene simulation (DTSS). The pixel elements of the display are composed of thermally-isolated resistive heaters. The main innovation is the fabrication method which uses commercial CMOS integrated circuit (IC) foundries. This method produces a low- manufacturing-cost, high-yield, thermal display technology. Circuits for drive and control are monolithically integrated on the display. The microheating element has a thermal time constant of a few milliseconds and a temperature range of operation from ambient to over 1000 degree(s)C. A 16 X 16 pixel array with a 0.2 mm pixel pitch is presented as a demonstration of the concept; however, the circuit design supports larger sizes (e.g., 256 X $256). This display technology is compatible with DTSS requirements for laboratory and fieldable built-in test/built-in test equipment (BIT/BITE) applications.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Gaitan, M. Parameswaran, R. Barry Johnson, and Ronald Chung "Commercial CMOS foundry thermal display for dynamic thermal scene simulation", Proc. SPIE 1969, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing IV, (31 August 1993); https://doi.org/10.1117/12.154731
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