Laser ablation characterization of an ArF excimer-laser-ablated plasma

Ye Yung Teng; Zen Wen Hwang; Yong Il Lee; Joseph Sneddon

doi:10.1117/12.144178

11 May 1993 Laser ablation characterization of an ArF excimer-laser-ablated plasma

Ye Yung Teng, Zen Wen Hwang, Yong Il Lee, Joseph Sneddon

Proceedings Volume 1979, 1992 International Conference on Lasers and Optoelectronics; (1993) https://doi.org/10.1117/12.144178
Event: 1992 International Conference on Lasers and Optoelectronics, 1992, Bejing, China

Abstract

Recent work from this research group has investigated and characterized a plasma formed by an ArF excimer laser at a metal surface. The ArF excimer laser plasma has the potential to replace conventional plasma (e.g., inductively coupled plasma, direct current plasma, etc.) for spectrochemical analysis. This paper describes the formation and instrumentation used to characterize and evaluate the plasma. Space and time resolved studies using emission measurements were obtained for copper and lead targets. Results are presented which show that the two metals gave quite different sizes of plasma. The plasma formed with copper extending 2 mm, and that with lead extending 5 mm above the metal surface. Excitation temperature of the plasma was calculated using the Boltzmann method and found to be in the range 11,200 to 17,200 degree(s)K for copper and 11,700 to 15,300 degree(s)K for lead. The effect of pressure over the range 10 - 760 torr and atmosphere (air, argon, and helium) on the shape and line-to background ratio and temperature of the plasma created above the surface of a copper target also is discussed.

Citation Download Citation

Ye Yung Teng, Zen Wen Hwang, Yong Il Lee, and Joseph Sneddon "Laser ablation characterization of an ArF excimer-laser-ablated plasma", Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); https://doi.org/10.1117/12.144178

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