X-ray ionization: a key technique for high optical quality excimer lasers

P. Di Lazzaro

doi:10.1117/12.2308442

26 July 1993 X-ray ionization: a key technique for high optical quality excimer lasers

P. Di Lazzaro

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19830N (1993) https://doi.org/10.1117/12.2308442
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

The use of X-rays to preionize gaseous laser active media has well-recognized advantages with respect to the widely used UV techniques, in terms of preionization homogeneity, discharge uniformity and longer gas mixture lifetime, in particular for high output energy and/or high repetition rate excimer lasers. In this paper we will draw the attention to more recently discovered X-rays features, like the capability to switch the pumping discharge of gas lasers and the strong influence on the final optical quality of the laser beam (e.g. divergence, brightness, etc.). The theoretical considerations will be compared with the experimental results obtained in the last few years by the High Power Laser Laboratory of the ENEA Frascati Center.

Citation Download Citation

P. Di Lazzaro "X-ray ionization: a key technique for high optical quality excimer lasers", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19830N (26 July 1993); https://doi.org/10.1117/12.2308442

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