Fourier-transform speckle profilometry for shape measurements of diffuse objects with height discontinuities and isolated surfaces

Mitsuo Takeda

doi:10.1117/12.2308814

23 July 1993 Fourier-transform speckle profilometry for shape measurements of diffuse objects with height discontinuities and isolated surfaces

Mitsuo Takeda

Author Affiliations +

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AZ (1993) https://doi.org/10.1117/12.2308814
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

Dimensional micro-inspection of surfaces by optical triangulation is regaining interest with new approaches being tried. In this communication we describe an optical non-contact microtopographer that we developed and are presently expanding and improving. We will show that this kind of active, discrete triangulation based surface inspection system can be applied not only to large distance range sensing, but also to do microtopographic inspection of smaller samples or smother surfaces with resolutions that can be driven down to the sub micron range.

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Mitsuo Takeda "Fourier-transform speckle profilometry for shape measurements of diffuse objects with height discontinuities and isolated surfaces", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AZ (23 July 1993); https://doi.org/10.1117/12.2308814

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