Expert system for automatic optical flatness standard measurement

Leszek Salbut

doi:10.1117/12.2308816

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23 July 1993 Expert system for automatic optical flatness standard measurement

Leszek Salbut

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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983B1 (1993) https://doi.org/10.1117/12.2308816
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

This paper proposes a method to obtain the shape of large plane surfaces by connecting measured phase distributions by a small aperture interferometer. To correct tilt and vertical displacement of individual phase distributions, measurements are made so that areas of the measurement have common area with the adjacent areas and then these are connected by minimizing squared difference in the common areas. An experimental result of connection is also shown.

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Leszek Salbut "Expert system for automatic optical flatness standard measurement", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B1 (23 July 1993); https://doi.org/10.1117/12.2308816

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