High-performance microphotonic devices with microactuator

Hiroshi Goto

doi:10.1117/12.165704

15 December 1993 High-performance microphotonic devices with microactuator

Hiroshi Goto

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165704
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Miniature active optical components with micro actuator are developed to miniaturize active optical components and sensors. The piezoelectric micro actuator and the miniature 2-D optical scanner, these are the key devices of the components, and its applications are described in detail.

Citation Download Citation

Hiroshi Goto "High-performance microphotonic devices with microactuator", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165704

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