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15 December 1993 High-precision molding of integrated optical structures
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Abstract
Various techniques for potential low-cost fabrication of integrated optical devices by hot embossing into polymers are presented. Their advantages and disadvantages concerning fabrication restrictions and thermal properties of final devices are discussed. For two polymers, the long-term dimensional stability of embossed microstructures is investigated. The results show the suitability of this promising low-cost replication technique for practical applications.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luca G. Baraldi, Rino E. Kunz, and Joachim Meissner "High-precision molding of integrated optical structures", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165703
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