Ion beam milling of silicon carbide optical components

Kathy W. Hylton; Charles L. Carnal; J. R. Jackson; Charles M. Egert

doi:10.1117/12.167969

1 February 1994 Ion beam milling of silicon carbide optical components

Kathy W. Hylton, Charles L. Carnal, J. R. Jackson, Charles M. Egert

Proceedings Volume 1994, Advanced Optical Manufacturing and Testing IV; (1994) https://doi.org/10.1117/12.167969
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Silicon carbide (SiC) is emerging as an important ceramic material for optical applications requiring stiff, lightweight structures with good thermal conductivity. This report discusses the application of ion milling in the fabrication of SiC optical components. Ion beam milling combined with either ductile grinding or polishing provides an excellent approach to deterministic fabrication of SiC optical components. Results of recent roughness evolution studies for SiC samples prepared by several pre-ion milling fabrication processes suggest that ductile grinding and some polishing processes can be used to produce low-subsurface-damage components suitable for ion milling. Typical improvements with optical figures after ion milling have convergences on the order of 2 or 3. Overall, these experiments indicate that ion milling combined with other fabrication processes represents a viable, highly deterministic approach to producing high-precision SiC optical components.

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Kathy W. Hylton, Charles L. Carnal, J. R. Jackson, and Charles M. Egert "Ion beam milling of silicon carbide optical components", Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); https://doi.org/10.1117/12.167969

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