Wideband monitoring of optical coatings with deposition error correction

Peiyun Wu; Peifu Gu; Jinfa Tang

doi:10.1117/12.163656

25 November 1993 Wideband monitoring of optical coatings with deposition error correction

Peiyun Wu, Peifu Gu, Jinfa Tang

Proceedings Volume 2000, Current Developments in Optical Design and Optical Engineering III; (1993) https://doi.org/10.1117/12.163656
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The manufacture of complex multilayers requires the maker to have a satisfactory monitoring system. The monitoring system can control accuracy not only in optical thicknesses of nonquarterwave layers but can also compensate deposition errors in real-time in order to secure a stable monitoring and eventually to achieve the desired optical performance. In this paper, a computer controlled apparatus for monitoring of wideband optical coatings is described. A method, based on performance measurements during the monitoring of a layer in situ, has been developed to determine the actual refractive index and thickness of the layer in vacuo. The method can be used as a means of detecting deposition errors.

Citation Download Citation

Peiyun Wu, Peifu Gu, and Jinfa Tang "Wideband monitoring of optical coatings with deposition error correction", Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); https://doi.org/10.1117/12.163656

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