Effects of detector characteristics on the phase measurement in quasi-heterodyne reference-beam ESPI

Wen Zheng

doi:10.1117/12.165452

10 December 1993 Effects of detector characteristics on the phase measurement in quasi-heterodyne reference-beam ESPI

Wen Zheng

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165452
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This paper describes the statistical distribution of metrological fields and the phase measurement method in quasi-heterodyne reference-beam ESPI under limited detector resolution. The effects of resolution, electronic noise, intensity saturation, and the quantization error on the phase measurement are discussed. The limitation of non-linearity of the detector to the phase extraction is also investigated.

Citation Download Citation

Wen Zheng "Effects of detector characteristics on the phase measurement in quasi-heterodyne reference-beam ESPI", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165452

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available