Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave

Osami Sasaki; Xiangzhao Wang; Yuuichi Takebayashi; Takamasa Suzuki

doi:10.1117/12.165461

10 December 1993 Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave

Osami Sasaki, Xiangzhao Wang, Yuuichi Takebayashi, Takamasa Suzuki

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165461
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We propose a sinusoidal phase-modulating Fizeau interferometer using self-pumped conjugate wave for surface profile measurements. The interferometer is self-referencing and free from the effects of the axial movements of object surfaces. The characteristics of the interferometer are made clear through the surface measurement of a diamond-turned aluminum disk. For large-size objects, the size of the plate glass can be much smaller than that of the object. The small-size plate glass provides the accurate sinusoidal phase modulation easily. We also propose the method of absolute measurement to eliminate the undesirable phase distribution caused by aberration of the lenses. It is shown through the surface profile measurements of a mirror that the interferometer and the method of absolute measurement are useful for large- size objects.

Citation Download Citation

Osami Sasaki, Xiangzhao Wang, Yuuichi Takebayashi, and Takamasa Suzuki "Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165461

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KEYWORDS

Interferometers

Glasses

Phase conjugation

Fizeau interferometers

Lenses

CCD image sensors

Phase interferometry

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