Design and fabrication of a reflection far-ultraviolet polarizer and retarder

Jongmin Kim; Muamer Zukic; Michele M. Wilson; Douglas G. Torr

doi:10.1117/12.168569

15 February 1994 Design and fabrication of a reflection far-ultraviolet polarizer and retarder

Jongmin Kim, Muamer Zukic, Michele M. Wilson, Douglas G. Torr

Proceedings Volume 2010, X-Ray and Ultraviolet Polarimetry; (1994) https://doi.org/10.1117/12.168569
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

New methods have been developed for the design of a far ultraviolet multilayer reflection polarizer and retarder. A MgF₂/Al/MgF₂ three-layer structure deposited on a thick opaque Al film (substrate) is used for the design of polarizers and retarders. The induced transmission and absorption method is used for the design of a polarizer and layer-by-layer electric field calculation method is used for the design of a quarterwave retarder. In order to fabricate these designs in a conventional high vacuum chamber we have to minimize the oxidation of the Al layers and somehow characterize the oxidized layer. X-ray photoelectron spectroscopy is used to investigate the amount and profile of oxidation. Depth profiling results and a seven layer oxidation model are presented.

Citation Download Citation

Jongmin Kim, Muamer Zukic, Michele M. Wilson, and Douglas G. Torr "Design and fabrication of a reflection far-ultraviolet polarizer and retarder", Proc. SPIE 2010, X-Ray and Ultraviolet Polarimetry, (15 February 1994); https://doi.org/10.1117/12.168569

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available