Adapting the Duoplasmatron EUV light source for use entirely within vacuum

Rene A. Boucarut; Douglas B. Leviton; Timothy J. Madison

doi:10.1117/12.167222

1 February 1994 Adapting the Duoplasmatron EUV light source for use entirely within vacuum

Rene A. Boucarut, Douglas B. Leviton, Timothy J. Madison

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167222
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Originally developed as an ion source for ion accelerators, the Duoplasmatron has also served as a VUV line source in monochromators. We have adapted and modified the Duoplasmatron, historically used at ambient conditions, for use in the vacuum chamber of the Diffraction Grating Evaluation Facility at NASA/GSFC. Construction, operational parameters and maintenance of the light source will be discussed.

Citation Download Citation

Rene A. Boucarut, Douglas B. Leviton, and Timothy J. Madison "Adapting the Duoplasmatron EUV light source for use entirely within vacuum", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167222

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