Determination of interfacial roughness correlation in W/C multilayer films: comparison using soft and hard x-ray diffraction

Don E. Savage; Yew-H. Phang; J. J. Rownd; James F. MacKay; Max G. Lagally

doi:10.1117/12.167208

1 February 1994 Determination of interfacial roughness correlation in W/C multilayer films: comparison using soft and hard x-ray diffraction

Don E. Savage, Yew-H. Phang, J. J. Rownd, James F. MacKay, Max G. Lagally

Author Affiliations +

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167208
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Interfacial roughness correlation in W/C multilayer films with periods of 23 angstroms, 30 angstroms, and 37 angstroms is examined with x-ray diffraction using (lambda) in the 10 angstroms to 13 angstroms range and (lambda) equals 1.54 angstroms. Transverse scans through multilayer Bragg reflections are analyzed to determine the magnitude and lateral correlation length of the component of interfacial roughness that is perfectly correlated through the multilayer stack. The results are independent of wavelength, even though hard x rays sample match more deeply into the film, indicating that interfacial roughness is not changing through these films.

Citation Download Citation

Don E. Savage, Yew-H. Phang, J. J. Rownd, James F. MacKay, and Max G. Lagally "Determination of interfacial roughness correlation in W/C multilayer films: comparison using soft and hard x-ray diffraction", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167208

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