Improved reflectometry facility at the National Institute of Standards and Technology

Charles Tarrio; Richard N. Watts; Thomas B. Lucatorto; M. Haass; T. A. Callcott; J. Jia

doi:10.1117/12.167221

1 February 1994 Improved reflectometry facility at the National Institute of Standards and Technology

Charles Tarrio, Richard N. Watts, Thomas B. Lucatorto, M. Haass, T. A. Callcott, J. Jia

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167221
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We have recently completed construction of a high throughput, modest resolution soft x-ray monochromator installed at the Synchrotron Ultraviolet Radiation Facility of the National Institute of Standards and Technology. Although this monochromator will be used primarily to characterize the optical properties of multilayer-coated x-ray optics, the versatility of the instrument will enable us to measure such properties as reflectivity, transmission, diffraction, and scatter of a variety of components. We present measurements of monochromator throughput and resolution.

Citation Download Citation

Charles Tarrio, Richard N. Watts, Thomas B. Lucatorto, M. Haass, T. A. Callcott, and J. Jia "Improved reflectometry facility at the National Institute of Standards and Technology", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167221

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