Nongrazing high-reflective narrowband multilayer x-ray coatings

Muamer Zukic; Jongmin Kim; Michele M. Wilson; Jong Ho Park; Douglas G. Torr

doi:10.1117/12.167207

1 February 1994 Nongrazing high-reflective narrowband multilayer x-ray coatings

Muamer Zukic, Jongmin Kim, Michele M. Wilson, Jong Ho Park, Douglas G. Torr

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167207
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We report designs of multilayer narrowband reflective x-ray coatings that operate at non- grazing angles of incidence. The coatings are designed for the x-ray region from 0.1 nm - 7 nm with angles of incidence (measured relative to the film surface normal) (theta) ₀, ranging from 45 degree(s) - 85 degree(s). At 85 degree(s) angle of incidence the peak reflectance is more than 65% at 0.44 nm with bandwidth less than 0.006 nm. The grazing angle of incidence provides reflectance of more than 90% but without any spectral discrimination. This design provides very high spectral purity with reflectances as high as 65% for angles of incidence between 80 degree(s) and 85 degree(s).

Citation Download Citation

Muamer Zukic, Jongmin Kim, Michele M. Wilson, Jong Ho Park, and Douglas G. Torr "Nongrazing high-reflective narrowband multilayer x-ray coatings", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167207

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