Normal incidence imaging multilayer x-ray mirrors with the periods of nanometer and subnanometer scale

Nikolai N. Salashchenko; Sergey V. Gaponov; A. D. Akhsakhaljan; S. S. Andreev; Yuriy Ya. Platonov; Nicolay I. Polushkin; E. A. Shamov; S. I. Shinkarev; S. A. Zuev

doi:10.1117/12.167234

1 February 1994 Normal incidence imaging multilayer x-ray mirrors with the periods of nanometer and subnanometer scale

Nikolai N. Salashchenko, Sergey V. Gaponov, A. D. Akhsakhaljan, S. S. Andreev, Yuriy Ya. Platonov, Nicolay I. Polushkin, E. A. Shamov, S. I. Shinkarev, S. A. Zuev

Author Affiliations +

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167234
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Deposition possibility of small d-spacing (d equals 0.7 - 3 nm) multilayers on the basis of the material combinations W/Sb, W/Sc, Cr/Sc, Fe/Sc and their utilization as dispersive and focusing elements for the photon energy range E > 0.3 kev have been investigated. The use of the normal incidence spherical multilayers W/Sb, W/Sc and Cr/Sc for imaging of a high temperature laser produced plasma within the `water window' spectral range (0.3 < E < 0.5 kev) is presented.

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Nikolai N. Salashchenko, Sergey V. Gaponov, A. D. Akhsakhaljan, S. S. Andreev, Yuriy Ya. Platonov, Nicolay I. Polushkin, E. A. Shamov, S. I. Shinkarev, and S. A. Zuev "Normal incidence imaging multilayer x-ray mirrors with the periods of nanometer and subnanometer scale", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167234

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