Production of ultrasmooth electroform-replica mirrors for multilayer optics

Melville P. Ulmer; Robert I. Altkorn; Rudy H. Haidle; David W. Madsen

doi:10.1117/12.167243

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1 February 1994 Production of ultrasmooth electroform-replica mirrors for multilayer optics

Melville P. Ulmer, Robert I. Altkorn, Rudy H. Haidle, David W. Madsen

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Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167243
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We describe the fabrication of smooth electroformed replicas from gold-coated ceramic and lacquer-polished glass mandrels. We show that lowering the temperature of the plating both improves the surface quality of replicas produced from lacquer-polished substrates, although not to the levels that can be achieved using ceramic substrates. The low surface roughness and high ductility of electroforms make them attractive alternatives to conventional silicon and mica substrates for the production of bent and conformable multilayer optics. We describe preliminary work on multilayer coating an electroform produced from a sapphire master.

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Melville P. Ulmer, Robert I. Altkorn, Rudy H. Haidle, and David W. Madsen "Production of ultrasmooth electroform-replica mirrors for multilayer optics", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167243

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