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1 February 1994 Production of ultrasmooth electroform-replica mirrors for multilayer optics
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Abstract
We describe the fabrication of smooth electroformed replicas from gold-coated ceramic and lacquer-polished glass mandrels. We show that lowering the temperature of the plating both improves the surface quality of replicas produced from lacquer-polished substrates, although not to the levels that can be achieved using ceramic substrates. The low surface roughness and high ductility of electroforms make them attractive alternatives to conventional silicon and mica substrates for the production of bent and conformable multilayer optics. We describe preliminary work on multilayer coating an electroform produced from a sapphire master.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Melville P. Ulmer, Robert I. Altkorn, Rudy H. Haidle, and David W. Madsen "Production of ultrasmooth electroform-replica mirrors for multilayer optics", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167243
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