W/C multilayer monochromator for radiation biology and materials science applications

James F. MacKay; David W. Pearson; Paul M. DeLuca Jr.; Marion N. Gould; Max G. Lagally

doi:10.1117/12.167230

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1 February 1994 W/C multilayer monochromator for radiation biology and materials science applications

James F. MacKay, David W. Pearson, Paul M. DeLuca Jr., Marion N. Gould, Max G. Lagally

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Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167230
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A double mirror multilayer monochromator was constructed for the purpose of irradiating live cell cultures at the Synchrotron Radiation Center, University of Wisconsin-Madison. The monochromator is designed for the soft x-ray region with photon energies between 273 eV and 2400 eV. Multilayer mirrors with 55 bilayers of W/C and a bilayer spacing of d equals 3.0 nm are sputter deposited on Si substrates. By proper masking of the sputtering sources, variation in the bilayer spacing over the area of the mirror is minimized. The use of suitable filters with a Si(Li) detector allows determination of the spectral output of the monochromator. The output power of the monochromator between 273 eV and 900 eV is measured. Application of the monochromator to radiation biology and materials science are discussed.

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James F. MacKay, David W. Pearson, Paul M. DeLuca Jr., Marion N. Gould, and Max G. Lagally "W/C multilayer monochromator for radiation biology and materials science applications", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167230

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