Characterization of imaging normal-incidence multilayer mirrors for the 40- to 300-A range by spectroscopic techniques using a laser-plasma radiation source

Eugene N. Ragozin; Nikolai N. Kolachevsky; Mikhail M. Mitropolsky; Vladimir A. Slemzin; Nikolai N. Salashchenko

doi:10.1117/12.167387

1 February 1994 Characterization of imaging normal-incidence multilayer mirrors for the 40- to 300-Å range by spectroscopic techniques using a laser-plasma radiation source

Eugene N. Ragozin, Nikolai N. Kolachevsky, Mikhail M. Mitropolsky, Vladimir A. Slemzin, Nikolai N. Salashchenko

Author Affiliations +

Proceedings Volume 2012, Ultrashort Wavelength Lasers II; (1994) https://doi.org/10.1117/12.167387
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A number of high-performance normal-incidence multilayer mirrors (MMs) have been fabricated on concave (r equals 1.6 - 2.0 m) fused silica substrates using laser deposition and a magnetron ion sputtering source. The resonance wavelengths (lambda) ₀ equals 2nd of the MMs synthesized are proximate to 45, 130, 175, 190, and 304 angstroms. The MMs have been subjected to scrutiny by a spectroscopic technique employing a laser-plasma broadband XUV radiation source. The spectral shapes of the resonance reflection curves, the (lambda) ₀ values, and the aperture uniformity (topography) of the mirrors have been determined spectroscopically. Normal-incidence reflection maxima, which correspond to higher-order reflection (k(lambda) equals 2n_(lambda )d, k > 1), have been observed for all of the Mo-Si MMs with (lambda) >= 175 angstroms.

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Eugene N. Ragozin, Nikolai N. Kolachevsky, Mikhail M. Mitropolsky, Vladimir A. Slemzin, and Nikolai N. Salashchenko "Characterization of imaging normal-incidence multilayer mirrors for the 40- to 300-Å range by spectroscopic techniques using a laser-plasma radiation source", Proc. SPIE 2012, Ultrashort Wavelength Lasers II, (1 February 1994); https://doi.org/10.1117/12.167387

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