Paper
1 February 1994 Soft x-ray submicrometer imaging experiments with nanosecond exposure
Igor A. Artioukov, Alexander V. Vinogradov, Anatoli I. Fedorenko, V. V. Kondratenko, S. A. Yulin
Author Affiliations +
Abstract
The high throughput soft X-ray optical system was designed, constructed and tested for obtaining of magnified images of nonradiating objects at wavelength (lambda) equals 175...200 angstroms. The optical system consists of normal incidence multilayer mirrors including condenser and Schwarzschild objective with 10X magnification and it was applied together with laser produced plasma as an X-ray source. The magnified images with 0.7 micrometers resolution were produced in one shot exposure at 0.8...1 J of incident laser energy. These results show the potential for development of table-top soft X-ray microscopes with 1 nanosecond exposure and submicron spatial resolution.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor A. Artioukov, Alexander V. Vinogradov, Anatoli I. Fedorenko, V. V. Kondratenko, and S. A. Yulin "Soft x-ray submicrometer imaging experiments with nanosecond exposure", Proc. SPIE 2012, Ultrashort Wavelength Lasers II, (1 February 1994); https://doi.org/10.1117/12.167385
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KEYWORDS
X-rays

Mirrors

Objectives

Multilayers

X-ray imaging

Microscopes

Coating

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