Synthesis and measurement of normal incidence x-ray multilayer mirrors optimized for a photon energy of 390 eV

Anatoli I. Fedorenko; V. V. Kondratenko; Yurii P. Pershin; S. A. Yulin; E. N. Zubarev; Howard A. Padmore; K. C. Cheung; Gert E. van Dorssen; M. Roper; Igor V. Kozhevnikov; L. L. Balakireva; Alexander V. Vinogradov

doi:10.1117/12.167386

1 February 1994 Synthesis and measurement of normal incidence x-ray multilayer mirrors optimized for a photon energy of 390 eV

Anatoli I. Fedorenko, V. V. Kondratenko, Yurii P. Pershin, S. A. Yulin, E. N. Zubarev, Howard A. Padmore, K. C. Cheung, Gert E. van Dorssen, M. Roper, Igor V. Kozhevnikov, L. L. Balakireva, Alexander V. Vinogradov

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Proceedings Volume 2012, Ultrashort Wavelength Lasers II; (1994) https://doi.org/10.1117/12.167386
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Problems of short period multilayer mirrors fabrication are discussed. Results of synthesis of multilayer structures with nanometer period are presented. The shortest period observed is 13 angstroms for W - Si and W - B₄C sputtered multilayers. Measurements of near normal incidence reflectivity at (lambda) equals 31 - 32 angstroms are described for W - Sc multilayers with period about 16 angstroms. Measured reflectivity achieves 3.3% and is in good agreement with theoretical model.

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Anatoli I. Fedorenko, V. V. Kondratenko, Yurii P. Pershin, S. A. Yulin, E. N. Zubarev, Howard A. Padmore, K. C. Cheung, Gert E. van Dorssen, M. Roper, Igor V. Kozhevnikov, L. L. Balakireva, and Alexander V. Vinogradov "Synthesis and measurement of normal incidence x-ray multilayer mirrors optimized for a photon energy of 390 eV", Proc. SPIE 2012, Ultrashort Wavelength Lasers II, (1 February 1994); https://doi.org/10.1117/12.167386

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KEYWORDS

Reflectivity

Mirrors

Multilayers

Silicon

Scandium

X-rays

Sputter deposition

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