Design of an achromatic mass separator for a focused-ion-beam system

Jochen Teichert; Michail A. Tiunov

doi:10.1117/12.155687

3 September 1993 Design of an achromatic mass separator for a focused-ion-beam system

Jochen Teichert, Michail A. Tiunov

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155687
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The design of an achromatic mass separator which consists of two ExB filters, a stigmator, and the separation aperture is described. The optical properties of the ExB filters are derived. The influence of the designed mass separator on the spatial resolution of the column and the fringing field effects are discussed. First experimental results are shown.

Citation Download Citation

Jochen Teichert and Michail A. Tiunov "Design of an achromatic mass separator for a focused-ion-beam system", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155687

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available