Picosecond excimer laser-plasma x-ray source for microscopy, biochemistry, and lithography

I. C. Edmond Turcu; Ian N. Ross; P. Trenda; C. W. Wharton; R. A. Meldrum; Hiroyuki Daido; M. S. Schulz; P. Fluck; Alan G. Michette; A. P. Juna; Juan R. Maldonado; Harry Shields; Gregory J. Tallents; L. Dwivedi; J. Krishnan; D. L. Stevens; T. Jenner; Dimitri Batani; H. Goodson

doi:10.1117/12.168005

1 February 1994 Picosecond excimer laser-plasma x-ray source for microscopy, biochemistry, and lithography

I. C. Edmond Turcu, Ian N. Ross, P. Trenda, C. W. Wharton, R. A. Meldrum, Hiroyuki Daido, M. S. Schulz, P. Fluck, Alan G. Michette, A. P. Juna, Juan R. Maldonado, Harry Shields, Gregory J. Tallents, L. Dwivedi, J. Krishnan, D. L. Stevens, T. Jenner, Dimitri Batani, H. Goodson

Author Affiliations +

Proceedings Volume 2015, Applications of Laser Plasma Radiation; (1994) https://doi.org/10.1117/12.168005
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

At Rutherford Appleton Laboratory we developed a high repetition rate, picosecond, excimer laser system which generates a high temperature and density plasma source emitting approximately 200 mW (78 mW/sr) x ray average power at h(nu) approximately 1.2 KeV or 0.28 KeV < h(nu) < 0.53 KeV (the `water window'). At 3.37 nm wavelength the spectral brightness of the source is approximately 9 X 10¹¹ photons/s/mm²/mrad²/0.1% bandwidth. The x-ray source serves a large user community for applications such as: scanning and holographic microscopy, the study of the biochemistry of DNA damage and repair, microlithography and spectroscopy.

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I. C. Edmond Turcu, Ian N. Ross, P. Trenda, C. W. Wharton, R. A. Meldrum, Hiroyuki Daido, M. S. Schulz, P. Fluck, Alan G. Michette, A. P. Juna, Juan R. Maldonado, Harry Shields, Gregory J. Tallents, L. Dwivedi, J. Krishnan, D. L. Stevens, T. Jenner, Dimitri Batani, and H. Goodson "Picosecond excimer laser-plasma x-ray source for microscopy, biochemistry, and lithography", Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); https://doi.org/10.1117/12.168005

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